Design of MEMS Based Elecrostatically Controlled Micromirror Using COMSOL Multiphysics

In this paper, we have addressed the Design and simulation results of an electrostatically controlled micro mirror using COMSOL multiphysics Software. The structural mechanical properties of the actuation mechanism of a square shape micro-mirror with the lift-off of the structure used four springs simulating a prestressed cantilever beam. There are few base materials were introduced like Alumina, Aluminum 3003 H18, Copper and Aluminum. To make the leg or cantilever more efficient the Steel AISI 4340 was introduced together with base materials to further reduce the lift-off stress. From the analysis, we concluded that the best material combination is Aluminum 3003-H18 + Steel AISI 4340 which have less stress level and desired lift-off stress. Another important parameter have to measure in this structure is generally what prestress level is necessary to result in a desired lift-off.